Invention Grant
- Patent Title: Light-receiving device and method for producing the same
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Application No.: US14952582Application Date: 2015-11-25
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Publication No.: US09698297B2Publication Date: 2017-07-04
- Inventor: Yasuhiro Iguchi , Youichi Nagai
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2013-004879 20130115
- Main IPC: H01L31/109
- IPC: H01L31/109 ; H01L33/30 ; H01L31/00 ; H01L27/144 ; H01L31/0352 ; H01L31/103 ; H01L31/105 ; H01L31/18 ; H01L31/0304

Abstract:
A method produces a light-receiving device by growing a light-receiving layer having an undoped multi-quantum well structure; growing a cap layer on the light-receiving layer while the cap layer is doped with a p-type impurity during its growth; growing a mesa structure; growing a protective film on surfaces of the mesa structure; and annealing to form a p-n junction. The mesa structure is defined by a surrounding trench. Alternatively, a selective growth mask can be formed on the light-receiving layer whereafter the cap layer is grown on the light-receiving layer by use of the mask. In the alternative, the p-n junction is formed by diffusing p-type impurity from a p-type contact layer of the cap layer through a concentration adjusting layer thereof to the light-receiving layer.
Public/Granted literature
- US20160155880A1 LIGHT-RECEIVING DEVICE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-06-02
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