Invention Grant
- Patent Title: Real-time calibration for wafer processing chamber lamp modules
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Application No.: US14873480Application Date: 2015-10-02
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Publication No.: US09698065B2Publication Date: 2017-07-04
- Inventor: Chih-Tien Chang , Sunny Wu , Jo Fei Wang , Jong-I Mou , Chin-Hsiang Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/26 ; F27B17/00 ; H01L21/66 ; H01L21/67 ; H05B1/02 ; H01L21/324

Abstract:
An apparatus, a system and a method are disclosed. An exemplary apparatus includes a wafer processing chamber. The apparatus further includes radiant heating elements disposed in different zones and operable to heat different portions of a wafer located within the wafer processing chamber. The apparatus further includes sensors disposed outside the wafer processing chamber and operable to monitor energy from the radiant heating elements disposed in the different zones. The apparatus further includes a computer configured to utilize the sensors to characterize the radiant heating elements disposed in the different zones and to provide a calibration for the radiant heating elements disposed in the different zones such that a substantially uniform temperature profile is maintained across a surface of the wafer.
Public/Granted literature
- US20160027708A1 Real-Time Calibration for Wafer Processing Chamber Lamp Modules Public/Granted day:2016-01-28
Information query
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