- Patent Title: Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods
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Application No.: US14299850Application Date: 2014-06-09
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Publication No.: US09698041B2Publication Date: 2017-07-04
- Inventor: Matthew Busche , Wendell Boyd, Jr. , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67
Abstract:
Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects.
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