Invention Grant
- Patent Title: Substrate storage container and substrate storage container mounting table
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Application No.: US14656182Application Date: 2015-03-12
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Publication No.: US09698034B2Publication Date: 2017-07-04
- Inventor: Yuuichi Kuroda , Masaki Hirano , Tsunekazu Yasutake , Rempei Nakata
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2014-156806 20140731
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677
Abstract:
In accordance with an embodiment, a substrate storage container includes first and second cases, a lid and a moving unit. The first case is provided with an opening to take in or out a substrate. The lid closes the opening. The second case can move in a first direction crossing a surface of the first case. The opening is provided on the surface. The moving unit moves the second case in the first direction in response to the opening of the lid.
Public/Granted literature
- US09659800B2 Substrate storage container and substrate storage container mounting table Public/Granted day:2017-05-23
Information query
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