Invention Grant
- Patent Title: Processing instructing device, processing instructing method, computer program and processing device
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Application No.: US14232980Application Date: 2012-07-12
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Publication No.: US09696711B2Publication Date: 2017-07-04
- Inventor: Teruo Asakawa , Hirofumi Yamaguchi , Supika Mashiro , Toshihiko Iijima , Hirokazu Narisawa , Kou Fujimura
- Applicant: Teruo Asakawa , Hirofumi Yamaguchi , Supika Mashiro , Toshihiko Iijima , Hirokazu Narisawa , Kou Fujimura
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2011-157113 20110715; JP2011-157114 20110715
- International Application: PCT/JP2012/067831 WO 20120712
- International Announcement: WO2013/011920 WO 20130124
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G04F1/00 ; H01L21/00 ; G05B19/402 ; G05B19/418

Abstract:
A processing indicating device to improve the efficiency of processing on an object. The device includes a first communication unit which communicates information with a plurality of processing devices for processing the object and a second communication unit which communicates information with a conveyance controlling device controlling conveying of the object to the plurality of processing devices. An arrival time predicting unit predicts on the basis of information received by the second communication unit, the time when the conveying device arrives at one of the processing devices. In addition, a finish time predicting unit receives information and predicts the time when the processing on the object in the one processing device finishes. A processing indicating unit causes processing control information that orders the execution of device state improvement treatment to be transmitted to the one processing device on the basis of the predicted respective times.
Public/Granted literature
- US20140358271A1 PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPUTER PROGRAM AND PROCESSING DEVICE Public/Granted day:2014-12-04
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