Scanning laser microscope
Abstract:
An image having an expected superresolution effect is created in a straightforward manner and with superior precision. The invention provides a scanning laser microscope including a scanner that scans a laser beam emitted from an Ar laser device on a specimen; an objective lens that radiates the laser beam scanned by the scanner onto the specimen and that collects return light coming from the specimen; a detector array that has a plurality of minute detector elements arrayed at a position that is optically conjugate with the focal position of the objective lens; and a superresolution calculating portion that calculates a center position of a spot of the return light that is incident on the detector array on the basis of a light intensity signal output from each of the minute detector elements in the detector array.
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