Invention Grant
- Patent Title: Wafer test apparatus
-
Application No.: US14565946Application Date: 2014-12-10
-
Publication No.: US09696369B2Publication Date: 2017-07-04
- Inventor: Woo-kyu Lee , In-seok Hwang , Jong-koo Kil , In-ki Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2014-0013823 20140206
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/02 ; G01R1/073

Abstract:
A wafer test apparatus includes a probe station comprising a probe card that contacts a wafer positioned on a chuck during a wafer test. A test head is disposed on the probe card and tests electrical characteristics of a semiconductor chip positioned on the wafer. A probe card horizontality adjustment unit is positioned between the test head and the probe card and adjusts horizontality of the probe card during the wafer test.
Public/Granted literature
- US20150219710A1 WAFER TEST APPARATUS Public/Granted day:2015-08-06
Information query