Invention Grant
- Patent Title: Quantitative measurements using multiple frequency atomic force microscopy
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Application No.: US15083727Application Date: 2016-03-29
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Publication No.: US09696342B2Publication Date: 2017-07-04
- Inventor: Roger B Proksch , Jason Bemis
- Applicant: Oxford Instruments AFM Inc
- Applicant Address: US CA Goleta
- Assignee: Oxford Instruments AFM Inc.
- Current Assignee: Oxford Instruments AFM Inc.
- Current Assignee Address: US CA Goleta
- Agency: Law Office of Scott C Harris, Inc.
- Main IPC: G01Q60/32
- IPC: G01Q60/32 ; G01B17/08 ; G01Q10/00 ; B82Y35/00

Abstract:
The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.
Public/Granted literature
- US20160282384A1 QUANTITATIVE MEASUREMENTS USING MULTIPLE FREQUENCY ATOMIC FORCE MICROSCOPY Public/Granted day:2016-09-29
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