Invention Grant
- Patent Title: Workpiece handling system and methods of workpiece handling
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Application No.: US13658512Application Date: 2012-10-23
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Publication No.: US09694989B2Publication Date: 2017-07-04
- Inventor: Jason M. Schaller , Robert Brent Vopat , Charles T. Carlson , Malcolm N. Daniel , Aaron P. Webb , William T. Weaver
- Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Agency: Nields, Lemack & Frame, LLC
- Main IPC: B65G47/91
- IPC: B65G47/91 ; B65G49/06 ; H01L21/677 ; B65G49/00 ; H01L21/67

Abstract:
One embodiment of this workpiece handling system has conveyor belts and a load lock. A first swap robot holds and transports workpieces between a build station and the load lock. A gantry robot transports the workpieces between each of the conveyor belts and the first swap robot. In one instance, processed workpieces are transported from the first swap robot to a first conveyor belt and unprocessed workpieces are transported from a second conveyor belt to the first swap robot using the gantry robot. A second swap robot also may be used with the first swap robot to load and unload workpieces from the load lock.
Public/Granted literature
- US20130108401A1 WORKPIECE HANDLING SYSTEM AND METHODS OF WORKPIECE HANDLING Public/Granted day:2013-05-02
Information query
IPC分类: