Invention Grant
- Patent Title: Hybrid carbon-metal interconnect structures
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Application No.: US14931764Application Date: 2015-11-03
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Publication No.: US09680105B2Publication Date: 2017-06-13
- Inventor: Hans-Joachim Barth
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L51/00 ; H01L23/532 ; H01L21/768 ; H01L23/14 ; H01L21/48 ; H01L23/522 ; H01L23/64 ; H01L23/00 ; H01L29/16 ; H01L23/498

Abstract:
Embodiments of the present disclosure are directed towards techniques and configurations for hybrid carbon-metal interconnect structures in integrated circuit assemblies. In one embodiment, an apparatus includes a substrate, a metal interconnect layer disposed on the substrate and configured to serve as a growth initiation layer for a graphene layer and the graphene layer, wherein the graphene layer is formed directly on the metal interconnect layer, the metal interconnect layer and the graphene layer being configured to route electrical signals. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20160056384A1 HYBRID CARBON-METAL INTERCONNECT STRUCTURES Public/Granted day:2016-02-25
Information query
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