Invention Grant
- Patent Title: Solid mount bulk acoustic wave resonator structure comprising a bridge
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Application No.: US13337458Application Date: 2011-12-27
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Publication No.: US09673778B2Publication Date: 2017-06-06
- Inventor: Chris Feng , John Choy , Phil Nikkel
- Applicant: Chris Feng , John Choy , Phil Nikkel
- Applicant Address: SG Singapore
- Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/15
- IPC: H03H9/15 ; H03H9/13 ; H03H9/02 ; H03H9/17

Abstract:
A solid mount bulk acoustic wave resonator, comprises a first electrode; a second electrode; a piezoelectric layer disposed between the first and second electrodes; and an acoustic reflector comprising a plurality of layers and disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the acoustic reflector, the first electrode, the second electrode and the piezoelectric layer defines an active area of the acoustic resonator, and the piezoelectric layer extends over an edge of the first electrode. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator. The bridge overlaps a portion of the first electrode.
Public/Granted literature
- US20120161902A1 SOLID MOUNT BULK ACOUSTIC WAVE RESONATOR STRUCTURE COMPRISING A BRIDGE Public/Granted day:2012-06-28
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