Invention Grant
- Patent Title: Semiconductor device with metal think film and via
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Application No.: US14977337Application Date: 2015-12-21
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Publication No.: US09673144B2Publication Date: 2017-06-06
- Inventor: Isamu Nishimura , Michihiko Mifuji , Kazumasa Nishio
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Chen Yoshimura LLP
- Priority: JP2013-37578 20130227
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522 ; H01L23/528 ; H01L49/02 ; H01L23/525 ; H01L21/768 ; H01L27/01 ; H01L23/532

Abstract:
A semiconductor device has a resistor area and wiring area selectively disposed on a semiconductor substrate. In this semiconductor device, a second interlayer insulating film is formed above the semiconductor substrate, and a thin-film resistor is disposed on the second interlayer insulating film in the resistor area. Vias that contact the thin-film resistor from below are formed in the second interlayer insulating film. A wiring line is disposed on the second interlayer insulating film in the wiring area. A dummy wiring line that covers the thin-film resistor from above is disposed in a third wiring layer that is in the same layer as the wiring line, and an insulating film is interposed between the thin-film resistor and the dummy wiring line.
Public/Granted literature
- US20160111365A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-04-21
Information query
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