Invention Grant
- Patent Title: System and method for bonding package lid
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Application No.: US14163000Application Date: 2014-01-24
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Publication No.: US09673119B2Publication Date: 2017-06-06
- Inventor: Shih-Yen Lin , Yu-Chih Liu , Chin-Liang Chen , Wei-Ting Lin , Kuan-Lin Ho
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/10 ; H01L23/04 ; H01L23/31 ; H01L21/56 ; H01L23/58 ; H01L23/367 ; H01L23/00 ; H01L25/065 ; H01L25/18 ; H01L23/498

Abstract:
Disclosed herein is a device having a shaped seal ring comprising a workpiece, the workpiece comprising at least one dielectric layer disposed on a first side of a substrate, a seal ring disposed in the at least one dielectric layer, and at least one groove in the seal ring. A lid is disposed over the workpiece, the workpiece extending into a recess in the lid and a first thermal interface material (TIM) contacts the seal ring and the lid, with the first TIM extending into the at least one groove. The workpiece is mounted to the package carrier. A die is mounted over a first side of workpiece and disposed in the recess. A first underfill a disposed under the die and a second underfill is disposed between the workpiece and the package carrier. The first TIM is disposed between the first underfill and the second underfill.
Public/Granted literature
- US20150214128A1 System and Method for Bonding Package Lid Public/Granted day:2015-07-30
Information query
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