Invention Grant
- Patent Title: Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip
-
Application No.: US15048650Application Date: 2016-02-19
-
Publication No.: US09673016B2Publication Date: 2017-06-06
- Inventor: Ho Seob Kim , Tae Sik Oh , Dae Wook Kim , Hyung Woo Kim , Seung Jun Ahn
- Applicant: Industry-University Cooperation Foundation Sunmoon
- Applicant Address: KR Asan-si, Chungcheongnam-Do
- Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY
- Current Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY
- Current Assignee Address: KR Asan-si, Chungcheongnam-Do
- Agency: Park Law Firm
- Agent John K. Park
- Priority: KR10-2015-0024732 20150220
- Main IPC: B82Y10/00
- IPC: B82Y10/00 ; H01J37/063 ; H01J37/147 ; H01J37/065 ; H01J37/073

Abstract:
Disclosed is a micro-electron column including nanostructure tips each of which has a tubular, columnar, or blocky structure ranging in size from several nanometers to dozens of nanometers. In the micro-electron column, the nanostructure tips can easily emit electrons because a high electric field is generated at the end of the nanostructure tips when a voltage is applied to the nanostructure tips, and an induction electrode is disposed between the electron emitter and a source lens so as to help electrons emitted from the electron emitter to enter an aperture of a first lens electrode layer of the source lens, thereby realizing improved performance of the micro-electron column. In the micro-electron column, the size of the nanostructure tips may be larger than that of the aperture of a source lens.
Public/Granted literature
Information query