Invention Grant
- Patent Title: Peel resistant multilayer wiring board with thin film capacitor and manufacturing method thereof
-
Application No.: US13480925Application Date: 2012-05-25
-
Publication No.: US09672983B2Publication Date: 2017-06-06
- Inventor: Shuichi Oka , Shusaku Yanagawa , Kiwamu Adachi
- Applicant: Shuichi Oka , Shusaku Yanagawa , Kiwamu Adachi
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Dentons US LLP
- Priority: JP2011-124604 20110602
- Main IPC: H05K1/16
- IPC: H05K1/16 ; H01G4/005 ; H01G4/33 ; H01L23/498 ; H01L21/48 ; H05K3/46

Abstract:
A multilayer wiring board includes: a functional area which includes a thin film capacitor having a dielectric layer between an upper electrode and a lower electrode; and a peripheral area other than the functional area, wherein a mooring portion in which the dielectric layer and a conductive layer are laminated is provided in at least a portion of the peripheral area, and a roughness of a surface of the conductive layer which contacts the dielectric layer is greater than a roughness of a surface of the upper electrode or the lower electrode which contacts the dielectric layer.
Public/Granted literature
- US20120307469A1 MULTILAYER WIRING BOARD, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE Public/Granted day:2012-12-06
Information query