Invention Grant
- Patent Title: Resist composition, method for forming resist pattern, photo-reactive quencher and compound
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Application No.: US15072036Application Date: 2016-03-16
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Publication No.: US09671690B2Publication Date: 2017-06-06
- Inventor: Takashi Nagamine , Daichi Takaki , Miki Shinomiya
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2015-061286 20150324
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/32 ; C07C309/04 ; C07C309/19 ; C07C309/25 ; C07C309/29 ; C07C309/30 ; C07C381/12 ; C07C311/04 ; C07C309/07 ; C07C309/06 ; C07C65/05 ; C07C53/21 ; C07D307/00

Abstract:
A resist composition which generates an acid upon exposure and whose solubility in a developing solution changes under the action of an acid. The composition includes a base material component whose solubility in a developing solution changes under the action of an acid; an acid generator component which generates an acid upon exposure; and a photo-reactive quencher which contains a compound represented by the general formula shown below: in which Ra1 represents an alkyl group having 1 to 10 carbon atoms which may have a substituent; and Ra2 and Ra3 each independently represent an alkyl group having 1 to 10 carbon atoms which may have a substituent. X− represents a counter anion.
Public/Granted literature
- US20160282717A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, PHOTO-REACTIVE QUENCHER AND COMPOUND Public/Granted day:2016-09-29
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