Invention Grant
- Patent Title: Micro-position gap sensor assembly
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Application No.: US14696163Application Date: 2015-04-24
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Publication No.: US09671421B2Publication Date: 2017-06-06
- Inventor: Patrick Allen Lowery , John Thomas Dick , Michael Alex Kramer
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Main IPC: G01B7/14
- IPC: G01B7/14 ; G01P3/487 ; G01D5/14 ; G01D11/24 ; G01F1/00

Abstract:
A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.
Public/Granted literature
- US20160313141A1 MICRO-POSITION GAP SENSOR ASSEMBLY Public/Granted day:2016-10-27
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