Invention Grant
- Patent Title: Biosensor and method for manufacturing same
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Application No.: US14369199Application Date: 2012-04-02
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Publication No.: US09671360B2Publication Date: 2017-06-06
- Inventor: Heung Joo Shin , Jeong Il Heo , Yeong Jin Lim
- Applicant: Heung Joo Shin , Jeong Il Heo , Yeong Jin Lim
- Applicant Address: KR Ulsan
- Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee Address: KR Ulsan
- Agency: Revolution IP, PLLC
- Priority: KR10-2011-0146152 20111229
- International Application: PCT/KR2012/002444 WO 20120402
- International Announcement: WO2013/100264 WO 20130704
- Main IPC: G01N27/30
- IPC: G01N27/30 ; G01N27/327

Abstract:
Disclosed is a method for manufacturing a biosensor comprising (a) forming an insulating layer in an electrode region; (b) coating the first photoresist layer on the insulating layer; (c) performing the first exposing process on the first electrode region through the first photomask; (d) removing unexposed area of the first photoresist layer except for the first electrode region using development; (e) coating the second photoresist layer on the first electrode region and the insulating layer after the step (d); (f) performing the second exposing process on the second electrode regions through the second photomask; (g) performing the third exposing process on the top portion of the second photoresist layer through a photomask with open areas in the shape of micro-sized wires connecting the second electrode regions; (h) removing the second photoresist layer except for the portions exposed in the steps (c), (f) and (g) using development.
Public/Granted literature
- US20140353152A1 BIOSENSOR AND METHOD FOR MANUFACTRUING SAME Public/Granted day:2014-12-04
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