Invention Grant
- Patent Title: High numerical aperture objective lens system
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Application No.: US15243269Application Date: 2016-08-22
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Publication No.: US09671337B2Publication Date: 2017-06-06
- Inventor: Lev Ryzhikov
- Applicant: ASML Holding N.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.LC.
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G01N21/47 ; G03F7/20 ; G02B13/14 ; G01N21/95 ; G01N21/88 ; G02B21/02 ; G02B9/64 ; G02B13/16 ; G02B13/18 ; G02B27/00

Abstract:
An objective lens system having a high numerical aperture, a large working distance, and low optical aberrations over a wide spectral band of wavelengths is disclosed. The objective lens system includes a first lens group, a second lens group, and a third lens group. The first lens group includes first and second positive meniscus lenses that are positioned at a distance from each other along an optical axis of the objective lens system. The distance may be dependent on a focal length of the objective lens system. The second lens group includes first and second meniscus lenses and a bi-convex lens. The third lens group includes a bi-concave lens and a doublet lens.
Public/Granted literature
- US20160356710A1 High Numerical Aperture Objective Lens System Public/Granted day:2016-12-08
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