Invention Grant
- Patent Title: Anisotropic high resistance ionic current source (AHRICS)
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Application No.: US14251108Application Date: 2014-04-11
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Publication No.: US09670588B2Publication Date: 2017-06-06
- Inventor: Zhian He
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D7/12 ; C25D17/10

Abstract:
An electroplating apparatus that promotes uniform electroplating on the substrates having thin seed layers includes a convex anisotropic high resistance ionic current source (AHRICS), such as an electrolyte-permeable resistive domed plate. The AHRICS is positioned in close proximity of the substrate, so that a distance from the central portion of the AHRICS to the substrate is smaller than the distance from the edge portion of the AHRICS to the substrate. The apparatus further includes a plating chamber configured to hold the electrolyte and an anode. The apparatus further includes a substrate holder configured to hold the substrate. In some embodiments, the apparatus further includes a secondary (thief) cathode configured to divert ionic current from the near-edge region of the substrate.
Public/Granted literature
- US20140326608A1 ANISOTROPIC HIGH RESISTANCE IONIC CURRENT SOURCE (AHRICS) Public/Granted day:2014-11-06
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