- Patent Title: Base film and pressure-sensitive adhesive sheet provided therewith
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Application No.: US14005577Application Date: 2012-03-22
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Publication No.: US09670382B2Publication Date: 2017-06-06
- Inventor: Kazuyuki Tamura , Takashi Akutsu , Yuki Eto , Tomohide Hukuzaki
- Applicant: Kazuyuki Tamura , Takashi Akutsu , Yuki Eto , Tomohide Hukuzaki
- Applicant Address: JP Tokyo JP Osaka
- Assignee: LINTEC Corporation,Arakawa Chemical Industries, LTD.
- Current Assignee: LINTEC Corporation,Arakawa Chemical Industries, LTD.
- Current Assignee Address: JP Tokyo JP Osaka
- Agency: Cahn & Samuels, LLP
- Priority: JP2011-062947 20110322
- International Application: PCT/JP2012/057305 WO 20120322
- International Announcement: WO2012/128312 WO 20120927
- Main IPC: C09J7/02
- IPC: C09J7/02 ; C09J175/08 ; C09J175/16 ; H01L21/683 ; C08G18/48 ; C08G18/67 ; C08G18/75 ; C08G18/80 ; B32B27/36

Abstract:
The base film of the invention is a base film of a pressure-sensitive adhesive sheet for laminating onto a semiconductor wafer composed of: (A) a layer of a cured product in which a composition including a polyether polyol urethan(meth)acrylate oligomer and an energy ray curable monomer is cured by energy ray irradiation, and (B) a thermoplastic resin layer. The present invention, by using a surface protection sheet, protects a circuit side of a wafer with bumps, prevents collapse of bumps on the circuit side when grinding the back surface, and prevents generation of dimples or cracks on the grinding surface.
Public/Granted literature
- US20140065414A1 Base Film and Pressure-Sensitive Adhesive Sheet Provided Therewith Public/Granted day:2014-03-06
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