Invention Grant
- Patent Title: Substrate loading and unloading station with buffer
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Application No.: US13908909Application Date: 2013-06-03
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Publication No.: US09670010B2Publication Date: 2017-06-06
- Inventor: Ulysses Gilchrist , David R. Beaulieu , Peter F. Van der Meulen
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G49/00

Abstract:
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus is provided. The station has a loading and unloading aperture, a magazine door drive for opening a substrate magazine by removing a door of a substrate magazine through the loading and unloading aperture, and a substrate magazine transport having a magazine support, the substrate magazine transport being configured to move the substrate magazine horizontally between a first position and a second position. When in the first position the substrate magazine is seated on the magazine support and communicates with the aperture and when moved to the second position the substrate magazine is offset from the first position, where the substrate magazine remains seated on the magazine support during horizontal transfer between the first and second positions and another substrate magazine is capable of being located at the first position in communication with the aperture.
Public/Granted literature
- US20130336749A1 SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER Public/Granted day:2013-12-19
Information query
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