Invention Grant
- Patent Title: Polishing apparatus
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Application No.: US14645372Application Date: 2015-03-11
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Publication No.: US09669515B2Publication Date: 2017-06-06
- Inventor: Hisanori Matsuo , Yoshihiro Mochizuki , Keisuke Suzuki , Takahiro Tajiri , Souichirou Ichioka
- Applicant: EBARA CORPORATION , Kyushu Institute of Technology
- Applicant Address: JP Tokyo JP Fukuoka
- Assignee: Ebara Corporation,Kyushu Institute of Technology
- Current Assignee: Ebara Corporation,Kyushu Institute of Technology
- Current Assignee Address: JP Tokyo JP Fukuoka
- Agency: Baker & Hostetler LLP
- Priority: JP2014-050546 20140313
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B24B49/12 ; B24B53/017 ; H01L21/321

Abstract:
A polishing apparatus having a polishing pad surface property measuring device that is capable of measuring surface properties of a polishing pad in a state where a liquid film exists on the polishing pad is disclosed. The polishing apparatus includes a dam configured to dam a liquid on the polishing pad to form a liquid film having a thickness equal to or greater than a prescribed value in at least part of an area on the polishing pad, a light emitter having a light emission end disposed in the liquid film formed by the dam and configured to emit a laser beam onto the polishing pad, a light receiver disposed in the liquid film formed by the dam and configured to receive light scattered by and bounced off the polishing pad at a plurality of angles due to surface properties of the polishing pad after the laser beam is emitted from the light emitter, and a processor configured to perform Fourier transform on the light received by the light receiver into a predetermined wavelength corresponding to a reflection intensity distribution and to determine a feature quantity of the surface properties of the pad.
Public/Granted literature
- US20150283669A1 POLISHING APPARATUS Public/Granted day:2015-10-08
Information query
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