Invention Grant
- Patent Title: Laser apparatus and method of controlling laser apparatus
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Application No.: US14602208Application Date: 2015-01-21
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Publication No.: US09647415B2Publication Date: 2017-05-09
- Inventor: Hiroaki Tsushima , Osamu Wakabayashi , Takashi Matsunaga
- Applicant: Hiroaki Tsushima , Osamu Wakabayashi , Takashi Matsunaga
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2012-166292 20120726
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H01S3/00 ; H01S3/097 ; H01S3/08 ; H01S3/0971 ; H01S3/23

Abstract:
A laser apparatus according to embodiment may include: a laser chamber filled with a laser gain medium; a pair of electrodes disposed in the laser chamber; a charger configured to apply a charge voltage for causing a discharge to occur between the pair of the electrodes; a pulse power module configured to covert the charge voltage applied by the charger into a short pulsed voltage, and apply the short pulsed voltage between the pair of the electrodes; and a controller configured to calculate input energies Ein applied to the pair of the electrodes based on the charge voltage, calculate an integration value Einsum of the input energies Ein by integrating the calculated input energies Ein, and determine whether the integration value Einsum exceeds an integration lifetime value Einsumlife of input energy or not.
Public/Granted literature
- US20150139258A1 LASER APPARATUS AND METHOD OF CONTROLLING LASER APPARATUS Public/Granted day:2015-05-21
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