An integration equipment for replacing an evaporation material and a use method thereof are provided. The integration equipment includes an evaporation chamber region, a material replacing chamber region, a valve door disposed between the evaporation chamber region and the material replacing chamber region, and for separating the above two regions, a substrate disposed inside the evaporation chamber region, and a material feeding door disposed at a side of the material replacing chamber region away from the valve door. Each of the evaporation chamber region and the material replacing chamber region includes a carrying platform, multiple evaporation sources disposed on the carrying platform, multiple exchanging devices for fixing and delivering the multiple evaporation sources, an independent vacuum-pumping device, and a heating device disposed inside the carrying platform. The equipment is capable of replacing and preheating an evaporation material without breaking vacuum of the evaporation chamber region to increase production efficiency.