Invention Grant
- Patent Title: Method for producing group III nitride semiconductor light-emitting device
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Application No.: US14616498Application Date: 2015-02-06
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Publication No.: US09647170B2Publication Date: 2017-05-09
- Inventor: Masato Aoki
- Applicant: TOYODA GOSEI CO., LTD.
- Applicant Address: JP Kiyosu-Shi, Aichi-Ken
- Assignee: TOYODA GOSEI CO., LTD.
- Current Assignee: TOYODA GOSEI CO., LTD.
- Current Assignee Address: JP Kiyosu-Shi, Aichi-Ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2014-029564 20140219
- Main IPC: H01L33/00
- IPC: H01L33/00

Abstract:
The present techniques provide a method for producing a Group III nitride semiconductor light-emitting device, with suppression of an increase in polarity inversion defect density. The production method includes an n-type semiconductor layer formation step, a light-emitting layer formation step, and a p-type semiconductor layer formation step. The p-type semiconductor layer formation step includes a p-type cladding layer formation step. The p-type cladding layer formation step includes a first p-type semiconductor layer formation step for forming a p-type AlGaN layer, a first semiconductor layer growth intermission step after the first p-type semiconductor layer formation step, and a p-type InGaN layer formation step after the first semiconductor layer growth intermission step. In the first semiconductor layer growth intermission step, a mixture of nitrogen gas and hydrogen gas is supplied to the substrate.
Public/Granted literature
- US20150236193A1 Method For Producing Group III Nitride Semiconductor Light-Emitting Device Public/Granted day:2015-08-20
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