Invention Grant
- Patent Title: Vertical tunnel field effect transistor (FET)
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Application No.: US14578761Application Date: 2014-12-22
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Publication No.: US09647097B2Publication Date: 2017-05-09
- Inventor: Krishna Kumar Bhuwalka , Gerben Doornbos , Matthias Passlack
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/739 ; H01L29/775 ; H01L29/06 ; B82Y10/00 ; H01L29/423 ; H01L29/78

Abstract:
Among other things, one or more techniques for forming a vertical tunnel field effect transistor (FET), and a resulting vertical tunnel FET are provided herein. In an embodiment, the vertical tunnel FET is formed by forming a core over a first type substrate region, forming a second type channel shell around a circumference greater than a core circumference, forming a gate dielectric around a circumference greater than the core circumference, forming a gate electrode around a circumference greater than the core circumference, and forming a second type region over a portion of the second type channel shell, where the second type has a doping opposite a doping of the first type. In this manner, line tunneling is enabled, thus providing enhanced tunneling efficiency for a vertical tunnel FET.
Public/Granted literature
- US20150137079A1 VERTICAL TUNNEL FIELD EFFECT TRANSISTOR (FET) Public/Granted day:2015-05-21
Information query
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