Invention Grant
- Patent Title: Dummy FinFET structure and method of making same
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Application No.: US13454960Application Date: 2012-04-24
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Publication No.: US09647066B2Publication Date: 2017-05-09
- Inventor: Chang-Shen Lu , Chih-Tang Peng , Tai-Chun Huang , Pei-Ren Jeng , Hao-Ming Lien , Yi-Hung Lin , Tze-Liang Lee , Syun-Ming Jang
- Applicant: Chang-Shen Lu , Chih-Tang Peng , Tai-Chun Huang , Pei-Ren Jeng , Hao-Ming Lien , Yi-Hung Lin , Tze-Liang Lee , Syun-Ming Jang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/10 ; H01L21/8234 ; H01L29/66 ; H01L29/78 ; H01L21/20

Abstract:
A FinFET device may include a dummy FinFET structure laterally adjacent an active FinFET structure to reduce stress imbalance and the effects of stress imbalance on the active FinFET structure. The FinFET device comprises an active FinFET comprising a plurality of semiconductor fins, and a dummy FinFET comprising a plurality of semiconductor fins. The active FinFET and the dummy FinFET are laterally spaced from each other by a spacing that is related to the fin pitch of the active FinFET.
Public/Granted literature
- US20130277760A1 Dummy FinFET Structure and Method of Making Same Public/Granted day:2013-10-24
Information query
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