Invention Grant
- Patent Title: Methods of manufacturing magnetic memory device having a magnetic tunnel junction pattern
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Application No.: US14965386Application Date: 2015-12-10
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Publication No.: US09647033B2Publication Date: 2017-05-09
- Inventor: Hye Min Shin , Jun Ho Park , Dae Eun Jeong
- Applicant: Hye Min Shin , Jun Ho Park , Dae Eun Jeong
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2014-0186234 20141222
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/12

Abstract:
Methods of manufacturing a magnetic memory device including forming a lower magnetic layer, a tunnel barrier layer, and an upper magnetic layer on a substrate, forming a magnetic tunnel junction (MTJ) pattern by patterning the lower magnetic layer, the tunnel barrier layer, and the upper magnetic layer, forming a first insulating layer exposing an upper surface of the MTJ pattern, forming a polymer pattern on the exposed upper surface of the MTJ pattern, forming a second insulating layer exposing an upper surface of the polymer pattern, removing the polymer pattern to form a cavity in the second insulating layer, the cavity exposing the upper surface of the MTJ pattern, and forming a metal line by filling the cavity with a conductive metal.
Public/Granted literature
- US20160181509A1 METHODS OF MANUFACTURING MAGNETIC MEMORY DEVICE Public/Granted day:2016-06-23
Information query
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