Invention Grant
- Patent Title: Solid-state image pickup device, method of manufacturing the same, and electronic apparatus
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Application No.: US14449825Application Date: 2014-08-01
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Publication No.: US09647026B2Publication Date: 2017-05-09
- Inventor: Yoshiki Ebiko , Atsuhiko Yamamoto , Yasushi Tateshita , Hiromi Okazaki
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: JP2013-166856 20130809
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146

Abstract:
A solid-state image pickup device, including: a plurality of pixels; a separation structure provided along a boundary line adjacent to the plurality of pixels; the separation structure includes a groove provided from a back surface of the semiconductor substrate to a depth corresponding to a wavelength, the groove being positioned along the boundary line, a first separation layer provided in the groove, and a second separation layer provided above the first separation layer and corresponding to the boundary line, the second separation layer being connected to the first separation layer; and methods including the same.
Public/Granted literature
- US20150041942A1 SOLID-STATE IMAGE PICKUP DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS Public/Granted day:2015-02-12
Information query
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