Invention Grant
- Patent Title: Complementary thin film transistor driving back plate and preparing method thereof, and display device
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Application No.: US14416872Application Date: 2014-05-27
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Publication No.: US09647014B2Publication Date: 2017-05-09
- Inventor: Xiaodi Liu , Gang Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201310723714 20131224
- International Application: PCT/CN2014/078571 WO 20140527
- International Announcement: WO2015/096382 WO 20150702
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L27/092 ; H01L21/477 ; H01L21/02 ; H01L21/383 ; H01L21/8238

Abstract:
A complementary thin film transistor driving back plate and a preparing method thereof, and a display device are disclosed. The preparing method comprises: forming a lower electrode (102) on a base substrate (101); sequentially disposing a continuously grown dielectric layer (103), a semiconductor layer (104), and a diffusion protection layer (105); sequentially forming a no-photoresist region (107), an N-type thin film transistor preparation region (108), and a P-type thin film transistor preparation region (109); removing a photoresist layer (114) of the N-type thin film transistor preparation region (108); removing a diffusion protection layer (105) of the N-type thin film transistor preparation region (105); removing a photoresist layer (114) of the P-type thin film transistor preparation region (109); performing an oxidation treatment to the base substrate (101); disposing a passivation layer (111) on the base substrate (101); and forming an upper electrode (113) on the passivation layer (111).
Public/Granted literature
- US20150325605A1 COMPLEMENTARY THIN FILM TRANSISTOR DRIVING BACK PLATE AND PREPARING METHOD THEREOF, AND DISPLAY DEVICE Public/Granted day:2015-11-12
Information query
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