Invention Grant
- Patent Title: Semiconductor device with surrounding gate transistors in a NOR circuit
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Application No.: US14932185Application Date: 2015-11-04
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Publication No.: US09646991B2Publication Date: 2017-05-09
- Inventor: Fujio Masuoka , Masamichi Asano
- Applicant: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agent Laurence Greenberg; Werner Stemer; Ralph Locher
- Main IPC: H01L27/118
- IPC: H01L27/118 ; H01L27/092 ; H01L29/66 ; H01L29/78 ; H01L29/786 ; H01L21/8238 ; H01L27/12 ; H01L29/423

Abstract:
A semiconductor device employs surrounding gate transistors (SGTs) which are vertical transistors to constitute a CMOS NOR circuit. The NOR circuit is formed by using a plurality of MOS transistors arranged in m rows and n columns. The MOS transistors constituting the NOR circuit are formed on a planar silicon layer disposed on a substrate, and each have a structure in which a drain, a gate, and a source are arranged in a vertical direction, the gate surrounding a silicon pillar. The planar silicon layer includes a first active region having a first conductivity type and a second active region having a second conductivity type. The first active region and the second active region are connected to one another via a silicon layer formed on a surface of the planar silicon layer. This provides for a semiconductor device that constitutes a NOR circuit.
Public/Granted literature
- US20160056174A1 SEMICONDUCTOR DEVICE WITH SURROUNDING GATE TRANSISTORS IN A NOR CIRCUIT Public/Granted day:2016-02-25
Information query
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