Invention Grant
- Patent Title: Advanced excimer laser annealing for thin films
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Application No.: US14401476Application Date: 2013-03-14
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Publication No.: US09646831B2Publication Date: 2017-05-09
- Inventor: James S. Im
- Applicant: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Applicant Address: US NY New York
- Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Current Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Current Assignee Address: US NY New York
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- International Application: PCT/US2013/031732 WO 20130314
- International Announcement: WO2013/172965 WO 20131121
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/02 ; B23K26/00 ; B23K26/08 ; H01L21/268 ; H01L21/67 ; H01L21/70 ; H01L27/12 ; H01L29/04 ; H01L29/786 ; H01L29/66 ; B23K101/40

Abstract:
The present disclosure relates to a new generation of laser-crystallization approaches that can crystallize Si films for large displays at drastically increased effective crystallization rates. The particular scheme presented in this aspect of the disclosure is referred to as the advanced excimer-laser annealing (AELA) method, and it can be readily configured for manufacturing large OLED TVs using various available and proven technical components. As in ELA, it is mostly a partial-/near-complete-melting-regime-based crystallization approach that can, however, eventually achieve greater than one order of magnitude increase in the effective rate of crystallization than that of the conventional ELA technique utilizing the same laser source.
Public/Granted literature
- US20150076504A1 ADVANCED EXCIMER LASER ANNEALING FOR THIN FILMS Public/Granted day:2015-03-19
Information query
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