A semiconductor/dielectric interface having reduced interface trap density and a method of manufacturing the interface are disclosed. In an exemplary embodiment, the method of forming a semiconductor device includes receiving a substrate and forming a termination layer on a top surface of the substrate. The termination layer includes at least one of hydrogen, deuterium, or nitrogen. The method further includes depositing a dielectric layer on the termination layer such that the depositing of the dielectric layer does not disrupt the termination layer. The termination layer may be formed by a first deposition process that deposits a first material of the termination layer and a subsequent deposition process that introduces a second material of the termination layer into the first material. The termination layer may also be formed by a single deposition process that deposits both a first material and a second material of the termination layer.