LC tank circuitry with shielding structures
Abstract:
An integrated circuit having a resonant circuit is provided. The resonant circuit may include an inductor and a capacitor coupled in parallel. The inductor may be formed in a dielectric stack on a semiconductor substrate. An inductor shielding structure may be interposed between the inductor and the semiconductor substrate in the dielectric stack. The inductor shielding structure may be a closed loop structure that is electrically floating. The inductor shielding structure may also be formed using a figure 8 routing arrangement that is symmetrical to help cancel out any induced current from the inductor. A resonant circuit formed in this way may exhibit an enhanced Q factor.
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