Invention Grant
- Patent Title: Method and system for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor
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Application No.: US14363725Application Date: 2012-11-22
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Publication No.: US09644634B2Publication Date: 2017-05-09
- Inventor: Kai Zhang , Han Wu , Qizhi Li , Xiaozhang Zhang , Meng Zou
- Applicant: KYKY TECHNOLOGY CO., LTD. , TSINGHUA UNIVERSITY
- Applicant Address: CN Beijing CN Beijing
- Assignee: KYKY TECHNOLOGY CO., LTD.,TSINGHUA UNIVERSITY
- Current Assignee: KYKY TECHNOLOGY CO., LTD.,TSINGHUA UNIVERSITY
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: CN201110407350 20111208
- International Application: PCT/CN2012/085064 WO 20121122
- International Announcement: WO2013/082998 WO 20130613
- Main IPC: F04D27/00
- IPC: F04D27/00 ; F04D29/66 ; F04D19/04 ; F04D29/58 ; F04D29/058

Abstract:
A method for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor, by use of synchronously sampling signals of subcritical vibrations of the rotor generated after the rotor of the magnetic levitation molecular pump touches down so as to obtain the amplitude and the phase of subcritical vibrations of the rotor, based on which a compensation force is output for inhibiting subcritical vibrations of the rotor. Through using the present method, an accurate synchronous for signals of subcritical vibrations and fast inhibition for subcritical vibrations of the rotor is achieved.
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