Invention Grant
- Patent Title: MEMS device and method for manufacturing the MEMS device
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Application No.: US14320466Application Date: 2014-06-30
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Publication No.: US09641949B2Publication Date: 2017-05-02
- Inventor: Johann Massoner
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H04R31/00 ; H04R19/00 ; B81C1/00 ; H04R7/10
Abstract:
A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene.
Public/Granted literature
- US20150381078A1 MEMS Device and Method for Manufacturing the MEMS Device Public/Granted day:2015-12-31
Information query
