Invention Grant
- Patent Title: Feedback for buffer layer deposition
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Application No.: US14709262Application Date: 2015-05-11
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Publication No.: US09640705B2Publication Date: 2017-05-02
- Inventor: Jeffrey S. Britt , Scot Albright , Urs Schoop
- Applicant: Global Solar Energy, Inc.
- Applicant Address: US AZ Tucson
- Assignee: Global Solar Energy, Inc.
- Current Assignee: Global Solar Energy, Inc.
- Current Assignee Address: US AZ Tucson
- Agency: Kolisch Hartwell, P.C.
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L31/18 ; C23C18/12 ; H01L31/0392 ; H01L31/0749 ; H01L31/032
Abstract:
Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.
Public/Granted literature
- US20150263213A1 FEEDBACK FOR BUFFER LAYER DEPOSITION Public/Granted day:2015-09-17
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