Invention Grant
- Patent Title: Method for producing semiconductor device
-
Application No.: US15336972Application Date: 2016-10-28
-
Publication No.: US09640637B2Publication Date: 2017-05-02
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SIGNAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SIGNAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L29/78

Abstract:
A method for producing a semiconductor device includes a first step of forming a first insulating film around a fin-shaped semiconductor layer; a second step of forming a first pillar-shaped semiconductor layer, a first dummy gate, a second pillar-shaped semiconductor layer, and a second dummy gate; a third step of forming a third dummy gate and a fourth dummy gate; a fourth step of forming a third diffusion layer in an upper portion of the fin-shaped semiconductor layer, in a lower portion of the first pillar-shaped semiconductor layer, and in a lower portion of the second pillar-shaped semiconductor layer; a fifth step of forming a gate electrode and a gate line around the first pillar-shaped semiconductor layer and forming a contact electrode and a contact line around the second pillar-shaped semiconductor layer; and a sixth step of forming first to fifth contacts.
Public/Granted literature
- US20170047428A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE Public/Granted day:2017-02-16
Information query
IPC分类: