Invention Grant
- Patent Title: Method for fabricating non-volatile memory device
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Application No.: US13607350Application Date: 2012-09-07
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Publication No.: US09640548B2Publication Date: 2017-05-02
- Inventor: Ki-Hong Yang
- Applicant: Ki-Hong Yang
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2012-0024072 20120308
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/11582 ; H01L21/336

Abstract:
A method for fabricating a non-volatile memory device includes forming a stacked structure where a plurality of inter-layer dielectric layers and a plurality of second sacrificial layers are alternately stacked over the first gate electrode layer, forming a first channel hole that exposes the first sacrificial layer by penetrating through the stacked structure, forming a second channel hole by removing the exposed first sacrificial layer, forming an oxide layer by oxidizing a surface of the first gate electrode layer exposed through the first and second channel holes, forming a channel layer in the first and second channel holes, and forming second gate electrode layers in spaces from which the second sacrificial layers are removed, wherein a memory layer is interposed between the channel layer and the second gate electrode layer.
Public/Granted literature
- US20130237025A1 METHOD FOR FABRICATING NON-VOLATILE MEMORY DEVICE Public/Granted day:2013-09-12
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