Invention Grant
- Patent Title: High-mobility semiconductor heterostructures
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Application No.: US14742232Application Date: 2015-06-17
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Publication No.: US09640389B2Publication Date: 2017-05-02
- Inventor: Augustinas Vizbaras , Kristijonas Vizbaras
- Applicant: Brolis Semiconductors Ltd.
- Applicant Address: LT Vilnius
- Assignee: BROLIS SEMICONDUCTORS LTD.
- Current Assignee: BROLIS SEMICONDUCTORS LTD.
- Current Assignee Address: LT Vilnius
- Agency: Goodwin Procter LLP
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/02 ; H01L29/36 ; H01L29/12 ; H01L29/205 ; H01L43/06

Abstract:
A layer structure and method of fabrication of a semiconductor heterostructure containing a two-dimensional electron gas (2DEG), two-dimensional hole gas (2DHG), or a two-dimensional electron/hole gas (2DEHG). The heterostructure contains a quantum well layer with 2DEG, 2DHG, or 2DEHG embedded between two doped charge reservoir layers and at least two remote charge reservoir layers. Such scheme allows reducing the number of scattering ions in the proximity of the quantum well as well a possibility for a symmetric potential for the electron or hole wavefunction in the quantum well, leading to significant improvement in carrier mobility in a broad range of 2DEG or 2DHG concentration in the quantum well. Embodiments of the invention may be applied to the fabrication of galvano-magnetic sensors, HEMT, pHEMT, and MESFET devices.
Public/Granted literature
- US20150364547A1 HIGH-MOBILITY SEMICONDUCTOR HETEROSTRUCTURES Public/Granted day:2015-12-17
Information query
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