Invention Grant
- Patent Title: Method and system for maintaining an edge exclusion shield
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Application No.: US14440943Application Date: 2012-11-15
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Publication No.: US09640372B2Publication Date: 2017-05-02
- Inventor: Ralph Lindenberg , Erkan Koparal
- Applicant: Ralph Lindenberg , Erkan Koparal
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/EP2012/072777 WO 20121115
- International Announcement: WO2014/075729 WO 20140522
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C23C14/04 ; C23C14/50 ; C23C14/56 ; C23C16/04 ; C23C16/44 ; H01L21/67 ; H01L21/677
Abstract:
A method for extracting a shielding element from a processing chamber of a substrate processing system or inserting the shielding element into the processing chamber is provided. The substrate processing system includes the processing chamber, a first shielding element for excluding application of material onto parts of a substrate, and a substrate transportation system for transporting substrates or substrate carriers into and out of the processing chamber. The method includes transporting the first shielding element by the substrate transportation system.
Public/Granted literature
- US20150303041A1 METHOD AND SYSTEM FOR MAINTAINING AN EDGE EXCLUSION SHIELD Public/Granted day:2015-10-22
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