Invention Grant
- Patent Title: Operation limiting device, operation limiting method, and storage medium
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Application No.: US14389223Application Date: 2013-03-29
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Publication No.: US09639686B2Publication Date: 2017-05-02
- Inventor: Teruo Asakawa , Naoko Murata
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2012-081497 20120330
- International Application: PCT/JP2013/059463 WO 20130329
- International Announcement: WO2013/147120 WO 20131003
- Main IPC: G06F21/40
- IPC: G06F21/40 ; G06F17/30

Abstract:
Provided is an operation limiting device which makes it possible to achieve more robust security and safety in processing of a workpiece by a processing apparatus. The operation limiting device limits operations relating to processing of a workpiece by a processing apparatus, and is provided with: an authentication unit for authenticating each of a plurality of users; a receiving unit for receiving an operation request or permission for said operation, from a plurality of authenticated users; an operation enabling unit for enabling an operation if an operation request or permission has been received from the plurality of authenticated users; and a releasing unit for releasing the operation enabled state set by the operation enabling unit if processing relating to the operation has terminated or if a predetermined period of time corresponding to the operation has elapsed.
Public/Granted literature
- US20150332039A1 Operation Limiting Device, Operation Limiting Method, and Storage Medium Public/Granted day:2015-11-19
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