Invention Grant
- Patent Title: Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus
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Application No.: US14822111Application Date: 2015-08-10
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Publication No.: US09639007B2Publication Date: 2017-05-02
- Inventor: Timo Laufer , Alexander Sauerhoefer
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009045193 20090930
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/54 ; G03F7/20 ; F21V29/505 ; F21V29/71 ; F21V29/60 ; G02B7/18

Abstract:
An optical arrangement in an optical system, such as a microlithographic projection exposure apparatus, includes: at least one heat-emitting subsystem which emits heat during the operation of the optical system; a first heat shield which is arranged such that it at least partly absorbs the heat emitted by the heat-emitting subsystem; a first cooling device which is in mechanical contact with the first heat shield and is designed to dissipate heat from the first heat shield; and a second heat shield which at least partly absorbs heat emitted by the first heat shield. The second heat shield is in mechanical contact with a cooling device that dissipates heat from the second heat shield.
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