- Patent Title: Programmable imaging assembly for manufacturing biotest post arrays
-
Application No.: US14523757Application Date: 2014-10-24
-
Publication No.: US09639003B2Publication Date: 2017-05-02
- Inventor: Steven Douglas Slonaker
- Applicant: NIKON CORPORATION
- Applicant Address: JP
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP
- Agency: Roeder & Broder LLP
- Agent Steven G. Roeder
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/72 ; G03F1/00 ; G03F7/20 ; B01L3/00 ; G01N15/00 ; G01N15/14

Abstract:
An imaging assembly for directing a pattern of energy at a workpiece includes (i) a reticle that defines a reticle array that includes a plurality of spaced apart, transmitting regions; (ii) an illumination source that generates an illumination beam; and (iii) a director assembly that selectively directs the illumination beam at the reticle array, the director assembly includes a plurality of director elements that are individually controlled to selectively control the beam pattern that is directed at the reticle array.
Public/Granted literature
- US20150116682A1 PROGRAMMABLE IMAGING ASSEMBLY FOR MANUFACTURING BIOTEST POST ARRAYS Public/Granted day:2015-04-30
Information query