- Patent Title: Device and method for the interferometric measuring of an object
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Application No.: US14604849Application Date: 2015-01-26
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Publication No.: US09638513B2Publication Date: 2017-05-02
- Inventor: Christian Rembe
- Applicant: Polytec Gmbh
- Applicant Address: DE Waldbronn
- Assignee: Polytec GmbH
- Current Assignee: Polytec GmbH
- Current Assignee Address: DE Waldbronn
- Agency: Volpe and Koenig, P.C.
- Priority: DE102014201274 20140124
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/14 ; G01B11/06 ; G01P3/36 ; G01Q20/02

Abstract:
A device for the interferometric measuring of an object, including a radiation source for generating an output beam, at least one beam splitter, as well as at least one detector, with the beam splitter being arranged in the radiation path of the output beam such that the output beam is split into at least one measuring beam and one reference beam, and the device is embodied to interfere the reference beam on the detector with an interference beam to form an optic interference. The device has an open optic resonator, which is arranged in the radiation path of the device such that the measuring beam enters the open optic resonator and the interference beam emitted from the open optic resonator is interfered with a reference beam on the detector to form an optic interference. The invention further relates to a method for the interferometric measuring of an object.
Public/Granted literature
- US20150211841A1 DEVICE AND METHOD FOR THE INTERFEROMETRIC MEASURING OF AN OBJECT Public/Granted day:2015-07-30
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