Method for the manufacture of an optical article comprising the following steps: —providing a substrate having two main faces and bearing —OH functions on at least one of its faces, —successively exposing in this order one face of the substrate bearing —OH functions to at least 3 distinct materials named M1, M2, M3 and optionally material M4 in a vacuum chamber under conditions resulting in the deposit of those materials on the surface of the substrate, and wherein: —M1 is a substituted silane comprising at least one function X1 directly bonded to a Si atom of the substituted silane, wherein the Si—X1 group is capable of forming a covalent bond with a OH group of the substrate, X1 being preferably a hydrolysable group (such a —NH2 group) or a —OH group directly bonded to the silicon atom and comprising at least one fluorine containing group, —M2 is a substituted silane of number average molecular weight inferior or equal to 900 g/mol comprising at least one function X2 directly bonded to a silicon atom of said substituted silane wherein the Si—X2 group is capable of forming a covalent bond with a —OH group of the substrate and/or a covalent bond with M1, X2 being preferably a hydrolysable group (such a —NH2 group) or a OH group and at least one hydrophobic or oleophobic group, or at least one hydrophilic group, —Wherein M1 has a weight average molecular weight higher than M2 and the difference between M1 and M2 weight average molecular weights is equal to or higher than 600 g/mol, preferably equal to or higher than 900 g/mol. —M3 is a metal fluoride, —Optional M4 is a non fluorinated metal oxide or metal hydroxide.