A preparation method of carboxylic acids or ketones using ozone, singlet state oxygen atom O(1D) or hydroxyl free radical is provided. The method includes: filling ozone, singlet state oxygen atom O(1D) and/or hydroxyl free radical to cycloalkanes or benzenes at a pre-determined temperature and a pre-determined pressure in the presence or absence of light irradiation to produce carboxylic acids or ketones. The reaction occurs at room temperature and atmospheric pressure without producing harmful side products. The preparation method is a simple, low energy consuming, and eco-friendly method.