Invention Grant
- Patent Title: Evaluation method of suitable silica powder in manufacturing vitreous silica crucible for pulling of silicon single crystal
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Application No.: US14901034Application Date: 2013-06-30
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Publication No.: US09637405B2Publication Date: 2017-05-02
- Inventor: Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Makiko Hinooka
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- International Application: PCT/JP2013/067947 WO 20130630
- International Announcement: WO2015/001592 WO 20150108
- Main IPC: C30B15/10
- IPC: C30B15/10 ; G01N15/08 ; C03B1/00 ; G01N21/55 ; G02B21/00 ; C03B19/09 ; C30B29/06 ; G01N15/00 ; G01N33/00

Abstract:
An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.
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