Invention Grant
- Patent Title: Interposer and semiconductor device including the same
- Patent Title (中): 内插器和半导体器件包括相同的
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Application No.: US14291243Application Date: 2014-05-30
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Publication No.: US09591742B2Publication Date: 2017-03-07
- Inventor: Kei Murayama , Mitsutoshi Higashi , Koji Nagai , Hideaki Sakaguchi
- Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Applicant Address: JP Nagano-Shi
- Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee Address: JP Nagano-Shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2013-119125 20130605
- Main IPC: H05K7/00
- IPC: H05K7/00 ; H05K1/02

Abstract:
There is provided an interposer for cooling an electronic component. The interposer includes: a substrate body having a hollow cooling channel therein, wherein a cooling medium flows through the cooling channel, the cooling channel including: a plurality of main cooling channels extending in a certain direction and separated from each other; an inflow channel which is communicated with one end of the respective main cooling channels; and an outflow channel which is communicated with the other end of the respective main cooling channels, and a plurality of through electrode groups each comprising a plurality of through electrodes arranged in a line. Each of the though electrodes is formed through the substrate body to reach the first and second surfaces of the substrate body. The respective through electrode groups are partitioned by at least corresponding one of the main cooling channels.
Public/Granted literature
- US20140362552A1 INTERPOSER AND SEMICONDUCTOR DEVICE INCLUDING THE SAME Public/Granted day:2014-12-11
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